Course: Introduction to Physics of Thin Films and Surfaces

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Course title Introduction to Physics of Thin Films and Surfaces
Course code KFY/P752
Organizational form of instruction Lecture
Level of course not specified
Year of study not specified
Semester Winter and summer
Number of ECTS credits 4
Language of instruction Czech, English
Status of course unspecified
Form of instruction unspecified
Work placements unspecified
Recommended optional programme components None
  • Kormunda Martin, doc. Ing. Ph.D.
  • Novák Rudolf, doc. RNDr. Ing. DrSc.
  • Lörinčík Jan, RNDr. CSc.
Course content

Learning activities and teaching methods
Learning outcomes
Characterization of surfaces, perfect and real surfaces, surfaces crystallography, surface defects. Physical methods of thin films deposition (PVD): evaporation, magnetron sputtering, reactive deposition,, molecular beam epitaxy. Chemical vapour deposition (CVD), deposition of organic films, chemical and electrochemical deposition. Growth of thin films: condensation process, coalescence, crystallographic, disordered and amorphous structures, superlattices. Electron transport phenomena in thin films, surface effects, thermoemission, photoemission. Surface-electron interactions: elastic and inelastic collisions, basics of electron diffraction, LEED, RHEED, Auger electron spectroscopy, threshold potentials spectroscopy. SEM, electron probe microanalysis, ESEM. Surface-ion interactions: ion implantation, sputtering, experimental methods: SIMS, RBS, ERDA, PIXE. Surface-radiation interactions: photoelectron spectroscopy (XPS), basics of X-ray diffraction. Near-field microscopy: STM, principle, measuring regimes, image interpretation. AFM, principle, measuring regimes, advanced optical microscopy , confocal microscopy, near-field optical probe.

Teaching in English is meant only for erasmus and foreign students. In the case of a small number of students is teaching in a form of individual consultations.

Assessment methods and criteria
Recommended literature

Study plans that include the course
Faculty Study plan (Version) Branch of study Category Recommended year of study Recommended semester